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Ignition and dynamics of high-voltage glow discharge plasma implantation — Ricky K.Y. Fu (2005) | RDL Network
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Ignition and dynamics of high-voltage glow discharge plasma implantation
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Paul Kim Ho Chu
Ignition and dynamics of high-voltage glow discharge plasma implantation
Article
2005
en
Authors
+1 more
RF
Ricky K.Y. Fu
Paul Kim Ho Chu
XT
X.B. Tian
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