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Investigation of High Voltage Low Gas Pressure Glow Discharge in Direct-Current (DC) Plasma Immersion Ion Implantation — Xuchu Zeng (2000) | RDL Network
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Investigation of High Voltage Low Gas Pressure Glow Discharge in Direct-Current (DC) Plasma Immersion Ion Implantation
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Paul Kim Ho Chu
Investigation of High Voltage Low Gas Pressure Glow Discharge in Direct-Current (DC) Plasma Immersion Ion Implantation
Article
2000
en
Authors
+1 more
XZ
Xuchu Zeng
DK
Dixon T. K. Kwok
CC
Chung Chan
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