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Experimental investigation of discharge characteristics in enhanced glow discharge plasma immersion ion implantation — Qiu Yuan Lu (2008) | RDL Network
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Experimental investigation of discharge characteristics in enhanced glow discharge plasma immersion ion implantation
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Paul Kim Ho Chu
Experimental investigation of discharge characteristics in enhanced glow discharge plasma immersion ion implantation
Article
2008
en
Authors
+1 more
QL
Qiu Yuan Lu
LL
Liu He Li
RF
Ricky K.Y. Fu
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