Skip to content
RDL
Network
Ekosistem
Uygulama değiştir
EN
Hakkımızda
SSS
Giriş yap
Başla
Investigation of plasma potential and pulsed discharge characteristics in enhanced glow discharge plasma immersion ion implantation and deposition — Liuhe Li (2009) | RDL Network
Back
Cite
Save
Save for later
Share
Home
Publications
Investigation of plasma potential and pulsed discharge characteristics in enhanced glow discharge plasma immersion ion implantation and deposition
Shared by
Paul Kim Ho Chu
Investigation of plasma potential and pulsed discharge characteristics in enhanced glow discharge plasma immersion ion implantation and deposition
Article
2009
en
Authors
+1 more
LL
Liuhe Li
QL
Qiuyuan Lu
RF
Ricky K.Y. Fu
Discussion
(0)
Sign in
to like and join the discussion.
No comments yet. Be the first to comment.
Related publications
Article
2008
Experimental investigation of discharge characteristics in enhanced glow discharge plasma immersion ion implantation
Qiu Yuan Lu
,
Liu He Li
,
Ricky K.Y. Fu
,
Paul Kim Ho Chu
Article
2011
Influence of annular magnet on discharge characteristics in enhanced glow discharge plasma immersion ion implantation
Liu He Li
,
Zhuo Wang
,
Qiu Yuan Lu
,
En Jing Pang
,
Dan Dan Dun
,
Fu Shun He
,
Fen Li
,
Ricky K.Y. Fu
,
Paul Kim Ho Chu
Article
2009
Plasma sheath physics and dose uniformity in enhanced glow discharge plasma immersion ion implantation and deposition
Liuhe Li
,
Jianhui Li
,
Dixon T. K. Kwok
,
Zhuo Wang
,
Paul Kim Ho Chu
Article
2008
Investigation of plasma distribution in electron-focused electric field enhanced glow discharge plasma immersion ion implantation
Qiu Yuan Lu
,
Liu He Li
,
Ricky K.Y. Fu
,
Paul Kim Ho Chu
Article
2005
Experimental investigation of hybrid-evaporation-glow discharge plasma immersion ion implantation
L. H. Li
,
Yulun Wu
,
Y. H. Zhang
,
Ricky K.Y. Fu
,
Paul Kim Ho Chu
Discussion(0)
No comments yet. Be the first to comment.