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Investigation of plasma potential and pulsed discharge characteristics in enhanced glow discharge plasma immersion ion implantation and deposition — Liuhe Li (2009) | RDL Network
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Investigation of plasma potential and pulsed discharge characteristics in enhanced glow discharge plasma immersion ion implantation and deposition
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Paul Kim Ho Chu
Investigation of plasma potential and pulsed discharge characteristics in enhanced glow discharge plasma immersion ion implantation and deposition
Article
2009
en
Authors
+1 more
LL
Liuhe Li
QL
Qiuyuan Lu
RF
Ricky K.Y. Fu
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