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Evaporation–glow discharge hybrid source for plasma immersion ion implantation — L.H Li (2004) | RDL Network
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Evaporation–glow discharge hybrid source for plasma immersion ion implantation
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Paul Kim Ho Chu
Evaporation–glow discharge hybrid source for plasma immersion ion implantation
Article
2004
en
Authors
+7 more
LL
L.H Li
RF
Ricky K.Y. Fu
RP
R.W.Y. Poon
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