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Plasma immersion ion implantation of cylindrical bore using self-excited radio-frequency glow discharge — Chunzhi Gong (2010) | RDL Network
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Plasma immersion ion implantation of cylindrical bore using self-excited radio-frequency glow discharge
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Paul Kim Ho Chu
Plasma immersion ion implantation of cylindrical bore using self-excited radio-frequency glow discharge
Article
2010
en
Authors
+3 more
CG
Chunzhi Gong
ZZ
Zongtao Zhu
JS
Jingwei Shi
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