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Theoretical investigation of plasma immersion ion implantation of cylindrical bore using hollow cathode plasma discharge — Xiubo Tian (2009) | RDL Network
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Theoretical investigation of plasma immersion ion implantation of cylindrical bore using hollow cathode plasma discharge
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Paul Kim Ho Chu
Theoretical investigation of plasma immersion ion implantation of cylindrical bore using hollow cathode plasma discharge
Article
2009
en
Authors
+4 more
XT
Xiubo Tian
CG
Chunzhi Gong
HY
Huang Yong-Xian
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