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Plasma Immersion Ion Implantation Facility and Research in Hong Kong — Paul Kim Ho Chu (1996) | RDL Network
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Plasma Immersion Ion Implantation Facility and Research in Hong Kong
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Paul Kim Ho Chu
Plasma Immersion Ion Implantation Facility and Research in Hong Kong
Article
1996
en
Authors
+1 more
Paul Kim Ho Chu
BT
Baoyin Tang
YC
Yaqi Cheng
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Recent research work on plasma immersion ion implantation of semiconductors
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Multiple ion-focusing effects in plasma immersion ion implantation
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