Large-scale local probe oxidation of OTS monolayers

A broad variety of functional structures with nanometer dimensions can be produced by combining the local probe oxidation of octadecyl trichlorosilane (OTS) self-assembled monolayers on silicon and suitable chemical modification and self-assembly methods. However, local probe-based patterning methods are inherently slow and, due to the small areas that are addressed, spectroscopic characterization is difficult. Here we report on the possibility of creating large-scale surface patterns by electro-oxidation using both an automated oxidation setup and conductive parallel cantilever arrays. This enables large-scale surface pattering while retaining the high resolution and freedom of (sequential) pattern formation, which would be lost if macroscopic patterned stamps were applied as electrodes.