The local oxidation of self-assembled monolayers with a scanning probe is a promising method for the generation of structures with chemical functionalities on the nanometer scale. This technique, which takes advantage of the chemical stability and versatility of self-assembled monolayers and the ability to pattern these monolayers by scanning-probe-based oxidation methods, enables the hierarchical assembly of complex structures in a controlled manner. Surface modification can be followed by the assembly of a further functional monolayer and/or additional surface-modification reactions in the targeted, sequential construction of functional device features.
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