Nanolithography and nanochemistry utilizing scanning probe techniques: directed self-assembly of sub-micrometer-sized structures by scanning probe lithography defined templates

The octadecyl trichlorosilane (OTS) monolayer was formed on Si carrier, and the template regulated by a local probe oxidation method from this was produced using a scanning probe lithography. The local probe oxidation was done by moving an AFM tip along an axle line. When the chip contacts a OTS layer, the uppermost metyl group thereof is partially oxidized to carboxylic acid. It is possible to observe this by a lateral direction force microscope. It was proven that the second OTBA monolayer gathers on this oxidized template, and the height increases in 2nm corresponding to the size of a ammonium salt, when this oxidation sample is exposed to a octadecyl trimethylammoniumbromide (OTBA) solution,. Similarly, it was observed that the height increases 20nm, when cationy poly-L-ricin covering gold nanoparticle (d=20nm) is used. In addition, we also succeeded in adsorption of the silica particle by adding silica nanoparticles, after adhering aminopropyltrimethoxysilane (APTS) to the oxidized template. This method can be used for the synthesis of nanosensors and nano electronic device or others.