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Effects of electron-focusing electric field upon enhanced glow discharge plasma ion implantation — Liuhe Li (2006) | RDL Network
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Effects of electron-focusing electric field upon enhanced glow discharge plasma ion implantation
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Paul Kim Ho Chu
Effects of electron-focusing electric field upon enhanced glow discharge plasma ion implantation
Article
2006
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Authors
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Liuhe Li
Paul Kim Ho Chu
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