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Synthesis of Soi Materials Using Plasma Immersion Ion Implantation — Paul Kim Ho Chu (1996) | RDL Network
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Synthesis of Soi Materials Using Plasma Immersion Ion Implantation
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Paul Kim Ho Chu
Synthesis of Soi Materials Using Plasma Immersion Ion Implantation
Article
1996
en
Authors
Paul Kim Ho Chu
Related publications
Article
2002
SOI material technology using plasma immersion ion implantation
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Plasma immersion ion implantation for SOI synthesis: SIMOX and ion-cut
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Jin Lee
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A plasma immersion ion implantation system for SOI wafer fabrication
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Microcavity engineering using plasma immersion ion implantation
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