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Plasma immersion ion implantation for SOI synthesis: SIMOX and ion-cut — Xiang Lü (1998) | RDL Network
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Plasma immersion ion implantation for SOI synthesis: SIMOX and ion-cut
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Paul Kim Ho Chu
Plasma immersion ion implantation for SOI synthesis: SIMOX and ion-cut
Article
1998
en
Authors
+5 more
XL
Xiang Lü
SI
S. Sundar Kumar Iyer
JL
Jin Lee
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