SiGe-on-insulator material fabrication by oxygen implantation into SiGe/Si heterostructure and novel two-step annealing — Miao Zhang (2004) | RDL Network
Lin Shao, Yuan Lin, J. K. Lee, Q. X. Jia, Yongqiang Wang, M. Nastasi, Philip E. Thompson, N. David Theodore, Paul Kim Ho Chu, T. L. Alford, J. W. Mayer, Peng Chen, S. S. Lau
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