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Relaxed SiGe-on-insulator fabricated by dry oxidation of sandwiched Si/SiGe/Si structure — Zengfeng Di (2005) | RDL Network
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Relaxed SiGe-on-insulator fabricated by dry oxidation of sandwiched Si/SiGe/Si structure
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Paul Kim Ho Chu
Relaxed SiGe-on-insulator fabricated by dry oxidation of sandwiched Si/SiGe/Si structure
Article
2005
en
Authors
+3 more
ZD
Zengfeng Di
MZ
Miao Zhang
WL
Weili Liu
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