Micrograph and structure of CrN films prepared by plasma immersion ion implantation and deposition using HPPMS plasma source

Zhongzhen Wu; Xiubo Tian; Chunzhi Gong; Shiqin Yang; Paul Kim Ho Chu

doi:10.1016/j.surfcoat.2012.04.012

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Micrograph and structure of CrN films prepared by plasma immersion ion implantation and deposition using HPPMS plasma source

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