synthesized by plasma immersion ion implantation-deposition

b c Abstract Diamond-like carbon (DLC) is an attractive biomedical material due to its high inertness and excellent mechanical properties. Using plasma immersion ion implantation-deposition (PIII-D), DLC films are fabricated on silicon substrates at room temperature. By changing the C H to Ar () flow ratio during deposition, the effects of the reactive gas pressure and flow ratio on F yF 22 C Ar H 2 2 the characteristics of the DLC films are systematically examined to correlate to the blood compatibility. The thickness, surface morphology, composition, structure, sp ysp content, as well as carbon-hydrogen bonding are studied using alpha-step profilometry, 32 atomic force microscopy (AFM), Rutherford backscattering spectrometry (RBS), Raman spectroscopy, and Fourier transform infrared spectroscopy (FTIR), respectively. The blood compatibility of the film is evaluated using in vitro platelet adhesion investigation, and the quantity and morphology of the adherent platelets are investigated employing optical microscopy and scanning electron microscopy (SEM). The Raman D-band to G-band intensity ratio is consistent with the adherent platelet quantity. Both first increase and then decrease with higher flow ratios. This implies that the blood compatibility of the