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Deformation behavior of titanium nitride film prepared by plasma immersion ion implantation and deposition — Nan Huang (2002) | RDL Network
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Deformation behavior of titanium nitride film prepared by plasma immersion ion implantation and deposition
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Paul Kim Ho Chu
Deformation behavior of titanium nitride film prepared by plasma immersion ion implantation and deposition
Article
2002
en
Authors
+6 more
NH
Nan Huang
GW
Guojiang Wan
YL
Y.X. Leng
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