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Microcavity engineering by plasma immersion ion implantation — Paul Kim Ho Chu (1998) | RDL Network
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Microcavity engineering by plasma immersion ion implantation
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Paul Kim Ho Chu
Microcavity engineering by plasma immersion ion implantation
Article
1998
en
Authors
Paul Kim Ho Chu
NC
N.W. Cheung
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synthesized by plasma immersion ion implantation-deposition
Ning Huang
,
Y.X. Leng
,
Ping Yang
,
J. Wang
,
Hui Sun
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Paul Kim Ho Chu
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1995
Buried oxide formation by plasma immersion ion implantation
Junhong Min
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Paul Kim Ho Chu
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Yingchun Cheng
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J.B. Liu
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Seongil Im
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Siddharth Iyer
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2003
New plasma source for plasma immersion ion implantation
L.H. Li
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R.W.Y. Poon
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Sunny Kwok
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Paul Kim Ho Chu
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