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Microcavity engineering by plasma immersion ion implantation — Paul Kim Ho Chu (1998) | RDL Network
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Microcavity engineering by plasma immersion ion implantation
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Paul Kim Ho Chu
Microcavity engineering by plasma immersion ion implantation
Article
1998
en
Authors
Paul Kim Ho Chu
NC
N.W. Cheung
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synthesized by plasma immersion ion implantation-deposition
Ning Huang
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Y.X. Leng
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Ping Yang
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Buried oxide formation by plasma immersion ion implantation
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New plasma source for plasma immersion ion implantation
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