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Buried oxide formation by plasma immersion ion implantation — Junhong Min (1995) | RDL Network
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Buried oxide formation by plasma immersion ion implantation
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Paul Kim Ho Chu
Buried oxide formation by plasma immersion ion implantation
Article
1995
en
Authors
+4 more
JM
Junhong Min
Paul Kim Ho Chu
YC
Yingchun Cheng
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