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Formation of Buried Porous Silicon Structure by Hydrogen Plasma Immersion Ion Implantation — Zhengjie Fan (1996) | RDL Network
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Formation of Buried Porous Silicon Structure by Hydrogen Plasma Immersion Ion Implantation
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Paul Kim Ho Chu
Formation of Buried Porous Silicon Structure by Hydrogen Plasma Immersion Ion Implantation
Article
1996
en
Authors
+2 more
ZF
Zhengjie Fan
Paul Kim Ho Chu
XL
Xiang Lü
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