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Interactions between plasma and ionization gauge in plasma immersion ion implantation — Xike Tian (2003) | RDL Network
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Interactions between plasma and ionization gauge in plasma immersion ion implantation
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Paul Kim Ho Chu
Interactions between plasma and ionization gauge in plasma immersion ion implantation
Article
2003
en
Authors
+1 more
XT
Xike Tian
RF
Ricky K.Y. Fu
DK
Dixon T. K. Kwok
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