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Modeling of the relationship between implantation parameters and implantation dose during plasma immersion ion implantation — Xiubo Tian (2000) | RDL Network
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Modeling of the relationship between implantation parameters and implantation dose during plasma immersion ion implantation
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Paul Kim Ho Chu
Modeling of the relationship between implantation parameters and implantation dose during plasma immersion ion implantation
Article
2000
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Authors
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Xiubo Tian
Paul Kim Ho Chu
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