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Hybrid processes based on plasma immersion ion implantation: a brief review — X.B. Tian (2004) | RDL Network
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Hybrid processes based on plasma immersion ion implantation: a brief review
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Paul Kim Ho Chu
Hybrid processes based on plasma immersion ion implantation: a brief review
Article
2004
en
Authors
+1 more
XT
X.B. Tian
Paul Kim Ho Chu
RF
Ricky K.Y. Fu
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