Development of an FMCW LADAR Source Chip using MEMS-Electronic-Photonic Heterogeneous Integration

We present a modular integration platform, combining active and passive photonic devices with CMOS integrated electronics. Based on this integration platform, an integrated Frequency Modulated Continuous Wave (FMCW) Laser Detection and Ranging (LADAR) source chip is being developed. Such a LADAR source chip can be used in miniaturized 3D imaging systems for defense and consumer electronics applications. In this paper, we discuss the integration approach, the performance of select individual components, and experimental results on a bench top LADAR model system.