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Combined impurity gettering effects of helium-induced cavities and oxygen precipitates created by plasma immersion ion implantation — Jing Min (1997) | RDL Network
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Combined impurity gettering effects of helium-induced cavities and oxygen precipitates created by plasma immersion ion implantation
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Paul Kim Ho Chu
Combined impurity gettering effects of helium-induced cavities and oxygen precipitates created by plasma immersion ion implantation
Article
1997
en
Authors
+2 more
JM
Jing Min
Paul Kim Ho Chu
XL
Xiang Lü
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