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AlN thin films fabricated by ultra-high vacuum electron-beam evaporation with ammonia for silicon-on-insulator application — Ming Zhu (2004) | RDL Network
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AlN thin films fabricated by ultra-high vacuum electron-beam evaporation with ammonia for silicon-on-insulator application
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Paul Kim Ho Chu
AlN thin films fabricated by ultra-high vacuum electron-beam evaporation with ammonia for silicon-on-insulator application
Article
2004
en
Authors
+3 more
MZ
Ming Zhu
PC
Peng Chen
RF
Ricky K.Y. Fu
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