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Electrical properties of AlN thin films prepared by ion beam enhanced deposition — Zhenghua An (2004) | RDL Network
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Electrical properties of AlN thin films prepared by ion beam enhanced deposition
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Paul Kim Ho Chu
Electrical properties of AlN thin films prepared by ion beam enhanced deposition
Article
2004
en
Authors
+2 more
ZA
Zhenghua An
CM
Chuanling Men
ZX
Z. Xu
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