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Utilizing On-Chip Testing and Electron Microscopy to Study Fatigue and Wear in Polysilicon Structural Films — Daan Hein Alsem (2004) | RDL Network
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Utilizing On-Chip Testing and Electron Microscopy to Study Fatigue and Wear in Polysilicon Structural Films
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Robert O. Ritchie
University of California, Berkeley
Utilizing On-Chip Testing and Electron Microscopy to Study Fatigue and Wear in Polysilicon Structural Films
MRS Proceedings 821
Article
2004
English
Authors
+2 more
DA
Daan Hein Alsem
ES
E.A. Stach
CM
Christopher L. Muhlstein
Abstract
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