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Utilizing on-chip testing and electron microscopy to obtain a mechanistic understanding of fatigue and wear in polysilicon structural films. — Michael T. Dugger (2004) | RDL Network
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Utilizing on-chip testing and electron microscopy to obtain a mechanistic understanding of fatigue and wear in polysilicon structural films.
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Robert O. Ritchie
University of California, Berkeley
Utilizing on-chip testing and electron microscopy to obtain a mechanistic understanding of fatigue and wear in polysilicon structural films.
Article
2004
en
Authors
+2 more
MD
Michael T. Dugger
ES
Eric A. Stach
CM
Chris L. Muhlstein
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Related publications
Article
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Utilizing On-Chip Testing and Electron Microscopy to Study Fatigue and Wear in Polysilicon Structural Films
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