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Two-dimensional numerical simulation of non-uniform plasma immersion ion implantation — Xike Tian (2004) | RDL Network
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Two-dimensional numerical simulation of non-uniform plasma immersion ion implantation
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Paul Kim Ho Chu
Two-dimensional numerical simulation of non-uniform plasma immersion ion implantation
Article
2004
en
Authors
+4 more
XT
Xike Tian
SY
S.Q. Yang
YH
Yongxian Huang
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