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Particle-in-cell numerical simulation of non-uniform plasma immersion ion implantation — Yongxian Huang (2006) | RDL Network
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Particle-in-cell numerical simulation of non-uniform plasma immersion ion implantation
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Paul Kim Ho Chu
Particle-in-cell numerical simulation of non-uniform plasma immersion ion implantation
Article
2006
en
Authors
+2 more
YH
Yongxian Huang
XT
Xike Tian
SY
S.Q. Yang
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