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Steady-state direct-current plasma immersion ion implantation using an electron cyclotron resonance plasma source — Xuchu Zeng (2001) | RDL Network
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Steady-state direct-current plasma immersion ion implantation using an electron cyclotron resonance plasma source
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Paul Kim Ho Chu
Steady-state direct-current plasma immersion ion implantation using an electron cyclotron resonance plasma source
Article
2001
en
Authors
+1 more
XZ
Xuchu Zeng
Paul Kim Ho Chu
QC
Qingchuan Chen
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