Rapid prototyping of complex structures with feature sizes larger than 20 μm

A rapid, low‐cost technique of microfabrication for feature sizes of 20 μm or more is described, which is useful for the rapid production of limited numbers of microsensor and optical structures. The pattern can be designed on a PC and printed out on transparent films of polymers using a commercial image‐setting system. The Figure shows an SEM image of a relief pattern generated on photoresistant film using this method. magnified image