Preparation of solid electrolyte PVDF on MOS ₂ in Silicon MCP for three-dimensional Li ion microbatteries

We report the preparation of MOS <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> anode and solid electrolyte PVDF for the construction of three-dimensional (3D) Li-ion microbatteries based on silicon MCP. The MoS <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> layer anode electrode on the Ni layer exhibits a higher specific capacity compared to other anode materials. The outstanding electrochemical property of the MOS <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> layer makes it promising anode materials. The PVDF as the electrolyte matrix is introduced into the MCP arrays by repetitive pumping and spinning. The smooth and conformal membrane prepared forms the basis of the 3D Li-ion microbattery.