Preparation of Ni current collector and MoS<inf>2</inf> cathode in three-dimensional Li ion microbattery based on silicon MCP

Three-dimensional Li ion microbatteries are known for their high surface area which leads to high current and capacity compared to traditional planar batteries. This paper describes economical approaches to prepare half 3D microbatteries based on silicon microchannel plates (MCP). The high aspect ratio silicon MCP is formed by electrochemical etching and a nickel layer is coated onto the silicon MCP as a current collector by electroless deposition. A molybdenum sulfide layer is electro-deposited onto the nickel coated silicon MCP as a cathode. The as-deposited molybdenum sulfide film is amorphous whereas the film annealed at a high temperature appears to be highly textured.