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Plasma immersion ion implantation into cylindrical bore using internal inductively-coupled radio-frequency discharge — Z.J. Wang (2010) | RDL Network
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Plasma immersion ion implantation into cylindrical bore using internal inductively-coupled radio-frequency discharge
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Paul Kim Ho Chu
Plasma immersion ion implantation into cylindrical bore using internal inductively-coupled radio-frequency discharge
Article
2010
en
Authors
+4 more
ZW
Z.J. Wang
XT
X. B. Tian
CG
Chunzhi Gong
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