Nanoindentation study on mechanical properties of Zr(C)N films deposited on NiTi shape memory alloy

Chenglin Chu; Hong Ji; Chao Guo; X.B. Sheng; Yinsheng Dong; P. H. Lin; Tao Hu; Paul Kim Ho Chu

doi:10.1109/inec.2010.5425083

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Nanoindentation study on mechanical properties of Zr(C)N films deposited on NiTi shape memory alloy

Article 2010 en

Abstract

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Surface nanomechanical properties of ZrN and ZrCN films deposited on NiTi shape memory alloy (SMA) by magnetron sputtering were investigated by nanoindentation study. And their surface deformation mechanism under nanoindentation load was also proposed and discussed by comparison with that of the electropolished NiTi SMA.

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