Making Honeycomb Microcomposites by Soft Lithography

Small structures tuned in terms of moduli and vibrational damping for use, for example, in microelectromechanical systems (MEMS) can be fabricated by soft lithography as an alternative to complex and expensive processes such as LIGA. The honeycomb structures produced consist of a metal or polymer core of variable geometry (see Fig.) sandwiched between two sheets of high tensile material to give structures with high strength-to-weight ratios.