Fabrication of High Performance Ceramic Microstructures from a Polymeric Precursor Using Soft Lithography
Article 2001 en
Authors
HY
H. Yang
PD
P. Deschatelets
SB
S. T. Brittain
Abstract
1 min read
Ceramic components for microelectromechanical (MEMS) systems, for example the micrometer-sized gear made from SiBNC shown in the Figure, offer the opportunity to extend MEMS technology towards high-temperature and oxidizing-environment applications, such as microturbines and high-temperature sensors and actuators. Preceramic polymers are used in conjunction with soft lithography and subsequent pyrolysis to produce the high aspect ratio structures.
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