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Magnetic field optimization and high-power discharge characteristics of cylindrical sputtering cathode — Tijun Li (2021) | RDL Network
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Magnetic field optimization and high-power discharge characteristics of cylindrical sputtering cathode
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Paul Kim Ho Chu
Magnetic field optimization and high-power discharge characteristics of cylindrical sputtering cathode
Article
2021
en
Authors
+7 more
TL
Tijun Li
SC
Suihan Cui
LL
Liangliang Liu
Abstract
1 min read
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