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Impact of Auxiliary Anode on Discharge Characteristics in High Power Impulse Magnetron Sputtering — Paul Kim Ho Chu (2016) | RDL Network
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Impact of Auxiliary Anode on Discharge Characteristics in High Power Impulse Magnetron Sputtering
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Paul Kim Ho Chu
Impact of Auxiliary Anode on Discharge Characteristics in High Power Impulse Magnetron Sputtering
Article
2016
en
Authors
+2 more
Paul Kim Ho Chu
TX
Tian Xiubo
GC
Gong Chunzhi
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