Low-voltage and high-speed CMOS/SIMOX technology

Low-voltage high performance 0.5 /spl mu/m CMOS TFSOI/SIMOX devices and ring oscillators with 1.5 V and 3.0 V supply voltage have been developed. Both N- and P-MOSFETs have well-behaved characteristics. The propagation delays per stage of a 19-stage CMOS/SIMOX ring oscillator are 840 ps and 390 ps with 1.5 V and 3 V supply voltage, respectively. The speed of a TF CMOS/SIMOX ring oscillator is much faster than that of CMOS devices fabricated in bulk silicon.