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Low-Temperature Floating Plasma Oxidation of Poly-SiGe — Zhineng Fan (1998) | RDL Network
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Low-Temperature Floating Plasma Oxidation of Poly-SiGe
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Paul Kim Ho Chu
Low-Temperature Floating Plasma Oxidation of Poly-SiGe
Article
1998
en
Authors
+3 more
ZF
Zhineng Fan
GZ
Gang Zhao
Paul Kim Ho Chu
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