Skip to content
RDL
Network
Ecosystem
Switch app
TR
About
FAQ
Sign in
Get started
Ion trajectories and shadow effects in mesh-assisted plasma immersion ion implantation of insulator — Yongxian Huang (2011) | RDL Network
Back
Cite
Save
Save for later
Share
Home
Publications
Ion trajectories and shadow effects in mesh-assisted plasma immersion ion implantation of insulator
Shared by
Paul Kim Ho Chu
Ion trajectories and shadow effects in mesh-assisted plasma immersion ion implantation of insulator
Article
2011
en
Authors
+5 more
YH
Yongxian Huang
XT
Xiubo Tian
SL
Shixiong Lv
Discussion
(0)
Sign in
to like and join the discussion.
No comments yet. Be the first to comment.
Related publications
Article
2003
Shadow effects in mesh-assisted plasma immersion ion implantation of insulating materials
X.B. Tian
,
R.K.Y. Fu
,
Sung-Min Yang
,
Paul Kim Ho Chu
Article
2004
Effects of mesh-assisted carbon plasma immersion ion implantation on the surface properties of insulating silicon carbide ceramics
Ricky K.Y. Fu
,
Ka Leung Fu
,
Xiubo Tian
,
Paul Kim Ho Chu
Article
1997
Ion-cut silicon-on-insulator fabrication with plasma immersion ion implantation
Xiang Lü
,
S. Sundar Kumar Iyer
,
Chenming Hu
,
N.W. Cheung
,
Jing Min
,
Zhineng Fan
,
Paul Kim Ho Chu
Article
2002
Multiple ion-focusing effects in plasma immersion ion implantation
X. B. Tian
,
Paul Kim Ho Chu
Article
1999
Thickness uniformity of silicon-on-insulator fabricated by plasma immersion ion implantation and ion cut
Zhengjie Fan
,
Paul Kim Ho Chu
,
N.W. Cheung
,
Chi Ho Chan
Discussion(0)
No comments yet. Be the first to comment.