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Influence of substrate bias on the composition of SiC thin films fabricated by PECVD and underlying mechanism — M. Wang (2006) | RDL Network
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Influence of substrate bias on the composition of SiC thin films fabricated by PECVD and underlying mechanism
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Paul Kim Ho Chu
Influence of substrate bias on the composition of SiC thin films fabricated by PECVD and underlying mechanism
Article
2006
en
Authors
+2 more
MW
M. Wang
XD
Xungang Diao
AH
Anping Huang
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