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Influence of magnetic field on magnetized hydrogen plasmas in plasma immersion ion implantation — Deli Tang (2003) | RDL Network
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Influence of magnetic field on magnetized hydrogen plasmas in plasma immersion ion implantation
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Paul Kim Ho Chu
Influence of magnetic field on magnetized hydrogen plasmas in plasma immersion ion implantation
Article
2003
en
Authors
+2 more
DT
Deli Tang
RF
Ricky K.Y. Fu
XT
X.B. Tian
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