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Implant damage and redistribution of indium in indium-implanted thin silicon-on-insulator — Peng Chen (2004) | RDL Network
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Implant damage and redistribution of indium in indium-implanted thin silicon-on-insulator
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Paul Kim Ho Chu
Implant damage and redistribution of indium in indium-implanted thin silicon-on-insulator
Article
2004
en
Authors
+4 more
PC
Peng Chen
ZA
Zhenghua An
MZ
Ming Zhu
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