High-Speed Tracking of a Nanopositioning Stage Using Modified Repetitive Control

In this paper, a modified repetitive control (MRC) based approach is developed for high-speed tracking of nanopositioning stages. First, the hysteresis nonlinearity is decomposed as a periodic disturbance over a linear system. Then, the MRC technique is utilized to account for the periodic disturbances/errors caused by the hysteresis and dynamics behaviors. The developed approach provides a simple and effective hysteresis compensation strategy, avoiding the constructions of hysteresis model and its inversion. Besides, with improved loop-shaping properties, the MRC can alleviate the nonperiodic disturbance amplification problem of the conventional repetitive control. Finally, the effectiveness and performance of the developed MRC-based approach are verified by the experimental results on a custom-built piezo-actuated stage in terms of hysteresis compensation, disturbance rejection and tracking accuracy.